Vacuum Technology Lab

Edwards EO6 Deposition System

The Edwards EO6 Deposition System is:

  • Diffusion pumped system to 10-6 Torr

  • DC and RF sputtering

  • Thermal evaporation of up to 2 sources sequentially

  • Substrate heating to 400°C

  • Thickness monitoring via quartz crystal microbalance

Denton DV502 Turbo Deposition System

The Denton DV502 Turbo Deposition System is:

  • Turbo pumped system to 10-6 Torr

  • Thermal evaporation of up to 2 sources sequentially

  • Substrate heating to 400°C

  • Thickness monitoring via quartz crystal microbalance

Dynavac CE12-14s Evaporation System

The Dynavac CE12-14s Evaporation System is:

  • Diffusion pumped system to 10-6 Torr

  • DC and RF sputtering of 2 sources simultaneously

  • Reactive sputtering with Oxygen atmosphere

  • Substrate heating to 400°C

Shannon E-beam Evaporation System

The Shannon E-beam Evaporation System is:

  • Diffusion pumped system to 10-6 Torr

  • E-beam evaporation

  • Substrate heating to 400°C

  • Thickness monitoring via quartz crystal microbalance

Acknowledgement of Country

UTS acknowledges the Gadigal people of the Eora Nation, the Boorooberongal people of the Dharug Nation, the Bidiagal people and the Gamaygal people, upon whose ancestral lands our university stands. We would also like to pay respect to the Elders both past and present, acknowledging them as the traditional custodians of knowledge for these lands.